• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    A blower assembly 70 for circulating gas in the laser chamber 10 is disclosed. The blower assembly 70 includes a drive assembly 132 that is operatively engaged with the drive side shaft 72 to rotate the fan assembly 102. The first bearing assembly 90A supports the drive side shaft 72. Blower assembly 70 further includes an idle side shaft 73 for supporting fan assembly 102 and a second bearing assembly 90B surrounding idle side shaft 73. The drive assembly 132 includes a motor 130 disposed on the rotor 110. The fan assembly 102 includes a pair of hubs 104A, 104B that support a plurality of blades 110. The first and second bearing assemblies 90A, 90B comprise a ceramic composite such as silicon nitride (Si 3 N 4 ) and are lubricated with a synthetic oil such as perfluoropolyalkylether (PFPE).
    公开号:KR20010073014A
    申请号:KR1020017002486
    申请日:1999-08-02
    公开日:2001-07-31
    发明作者:웹알.카일
    申请人:아킨스 로버트 피.；사이머 인코포레이티드；
    IPC主号:
    专利说明:

    Blower assembly for pulsed laser system with ceramic bearings {A BLOWER ASSEMBLY FOR A PULSED LASER SYSTEM INCORPORATING CERAMIC BEARINGS}
    [2] Pulsed laser systems such as excimer lasers are well known. FIG. 11 is a cross sectional end view of the laser chamber, indicated by reference numeral 10, used in a conventional pulsed laser system. The laser chamber 10 includes an electrode structure 22 that forms a discharge region 28, a heat exchanger 60, and a blower assembly 70. As is well known to those skilled in the art, pulsed laser systems generate energy pulses from a gas mixture between the electrode structures 22. Usually a mixture of gases containing krypton and fluorine is maintained at high pressure (eg 3 atm). The electrode structure 22 ionizes the gas mixture to generate a high energy discharge. The life cycle of a gas mixture is measured by the total number of high energy discharges that the gas mixture can produce. Typically, the light cycle has a discharge range of about 100 million to 200 million times.
    [3] The blower assembly 70 plays an important role in circulating the gas in the laser chamber 10 of the pulsed laser system. Gas circulation has many purposes and includes maintaining the temperature of the gas at the most effective level of the reaction among them, maximizing the gas life cycle, and facilitating the overall operation of the pulsed laser system, It is not limited to this. As mentioned above, krypton and fluorine are gases commonly used by the laser chamber 10. However, such gases adversely affect the performance of the pulsed laser system as well as the mechanical operation of the blower assembly 70. To make this problem more specific, by way of example, the blow assembly 70 is formed by a mechanical structure comprising a motor which is usually connected to the shaft by a lubricated bearing assembly, such as a ball bearing. The shaft rotates the fan to circulate the gas. Conventional bearing assemblies have been made of ferrous metals such as 440C stainless steel. The use of ferrous metals has various problems. First, gases, ie krypton and fluorine, can corrode and etch the structure of the bearing assembly, making the bearing assembly mechanically incomplete. Second, fluorine reacts with iron to form iron (III) fluoride particles (FeF 3 ) that contaminate the laser chamber 10. The iron (III) fluoride particles interfere with the ionization of the gas by the electrode structure 22 to produce a high energy discharge. Thirdly, the production of iron (III) fluoride also promotes a decrease in the function of the lubricating oil used in the bearing assembly. More specifically, perfluoropolyalkylether (PFPE) synthetic oils, such as kyytox 143AB manufactured by EIDu Pont Company, are commonly used to smooth bearing assemblies. Iron (III) fluoride, Lewis acid catalysts degrade the PFPE fluid's function at bitter contact temperatures up to about 350 ° C. An overview of the functional degradation of PFPE through the procatalyst pathway is illustrated in FIG. 12. R f and R ′ f in FIG. 12 are PFPE end groups of non-specific length. Degradation not only produces volatile acyl fluorides and ketones but also reduces the average molecular weight of the lubricant. The degraded product falls from the bearing assembly and causes mechanical wear and failure of the bearing.
    [4] Contamination of the laser chamber 10 with iron (III) fluoride particles degrades the performance of the pulsed laser system. The need to continue to replace or re-protect the ferrous metal bearings to effectively operate the blower assembly 70 reduces the gas life cycle of the laser assembly chamber 10. As a result, the overall efficiency and productivity of the pulsed laser system is lowered.
    [1] The present invention relates to a laser system, and more particularly to a blower assembly for circulating a gas in a laser discharge chamber of a laser system.
    [12] 1 is a cross-sectional end view of a laser chamber used in a pulsed laser system including a blower assembly of the present invention;
    [13] 2 is an external elevation view of one end of the laser chamber of FIG.
    [14] 3 is a schematic view of one side of the laser chamber of FIG.
    [15] 4 is a partial side cross-sectional view of the laser chamber, taken in the direction of the arrow of FIG. 1 and along the plane of lines 4-4;
    [16] 5 is a side cross-sectional view of the laser chamber of FIG. 1 illustrating a blower assembly;
    [17] 6 is a side elevation view of a blower assembly of the present invention supported by a laser chamber;
    [18] FIG. 7 is a blower assembly taken from the circled portion 7 of FIG. 6, illustrating a rotor coupled to the drive side shaft, a bearing assembly supporting the drive side shaft, and a fan assembly connected to the drive side shaft. Magnified section,
    [19] FIG. 8 is an enlarged cross sectional view of the blower assembly taken from the circled region 8 of FIG. 6 illustrating the idle shaft, the bearing assembly supporting the idle shaft, and the fan assembly connected to the idle shaft;
    [20] 9 is an elevation view of one end of the bearing assembly of FIGS. 7 and 8;
    [21] FIG. 10 is a side cross-sectional view of the bearing assembly taken in the direction of the arrow along the plane of lines 10-10 of FIG. 9 illustrating an outer race engaged with the inner race by a plurality of balls, FIG.
    [22] 11 is an end sectional view of a conventional laser chamber, and
    [23] FIG. 12 is a schematic diagram illustrating the chemical reaction of iron (III) fluoride (FeF 3 ) and perfluoropolyalkylether (PFPE) lubricating oils resulting in low molecular weight acyl fluoride and ketone products.
    [5] The present invention provides an overview of a laser chamber for a compact excimer laser. More specifically, the laser chamber of the present invention has an electrode structure that forms a discharge region for generating a high energy discharge. High energy discharges ionize gases such as krypton and fluorine and cause the gases to react chemically. A pre-ionizer is placed near the discharge area to promote the ionization of the gas. The main insulator is also disposed adjacent to the discharge region in order to allow proper discharge to be performed by the electrode structure. High energy discharges generate a large amount of localized heat in the gas and thus a head exchanger is provided to reduce the temperature of the gas. The laser chamber further includes a blower assembly for proper circulation and efficient flow of gas during operation of the excimer laser.
    [6] The blower assembly of the present invention is a drive side shaft supported by a laser chamber, a drive assembly operatively engaging the drive side shaft side for rotating the drive side shaft, and a fan engaged with the drive side shaft for circulating gas. Contains the assembly. The blower assembly further includes an idle side shaft for supporting the fan assembly. The drive side shaft, idle side shaft and fan assembly are made of materials such as nickel plated aluminum, monel, tin and the like that prevent erosion when exposed to gas. The blower assembly further includes a bearing assembly surrounding the drive and idle shafts for rotationally supporting the drive and idle shafts in the laser chamber. The bearing assembly is made of a ceramic compound such as silicon nitride (Si 3 N 4 ). Furthermore, the bearing assembly is lubricated with a synthetic lubricant such as perfluoropolyalkyl ether (PFPE).
    [7] In addition, the present invention
    [8] a) disposing a blower assembly in the laser chamber comprising a drive side shaft, a fan assembly engaged with the drive side shaft for circulating gas, and a bearing assembly surrounding the drive side shaft and comprising a ceramic compound; And
    [9] and b) rotating the drive side shaft to operably drive the fan assembly and to circulate the gas between the fan assembly and the laser chamber.
    [10] The gas in the laser chamber also circulates against the bearing assembly. The ceramic properties protect the bearing assembly from any inherent corrosion. Moreover, the ceramic composite does not react with the gas to contaminate the gas or adversely affect the chemical structure of the lubricant.
    [11] This, together with various additional advantages and features that will be apparent to those skilled in the art in the following description, provides a novel blower assembly and a novel method of the present invention, and by way of example only with reference to the accompanying drawings. Obtained by the preferred embodiment.
    [24] Referring now to the drawings in which like parts of the present invention are designated by like reference numerals, a laser chamber 10 similar to the Excimer Laser Model 5000 produced by Cymer, San Diego, California, can be seen in FIGS. 1-5. The laser chamber 10 is fully disclosed in U.S. Patent No. 4,959,840 to Akins et al., Assigned to the assignee of the present invention, and is incorporated herein by reference in its entirety, as it is repeated below. . The laser chamber 10 is formed on a pair of half-housing members, the upper housing member 12 and the lower housing member 14 and connected together and sealed using an "O" ring seal 16. It became. The combined half-housing members 12, 14 are essentially interconnected walls and are collectively and / or individually represented as reference numeral 18. Interconnected walls 18 form a laser cavity 20 that includes various components of the laser chamber 10. The wall 18 of the laser chamber 10 is any compatible with the particular gases used in the laser chamber 10 (eg, fluoro and krypton), such as nickel plated aluminum, tin, monel, gold, and the like. It is made of a suitable substance.
    [25] The electrode structure, indicated as reference numeral 22, is located in the laser cavity 20. The electrode structure 22 includes a cathode 24 and an anode 26 and is separated by a distance forming the electric discharge region 28. As can be seen in FIG. 4, the cathode 24 and the anode 26 are each formed as one continuous member. It is also understood that cathode 24 and anode 26 may be formed from a series of members. The cathode 24 and the anode 26 are made of any suitable high purity, insulative metal that can prevent corrosion to prevent contamination of the gas injected into the laser cavity 20. For example, the electrode structure 22 is made of brass insulated with a ceramic compound such as aluminum.
    [26] Base member 30 made of a suitable conductive material supports anode 26 with a threaded rod 32. The spacer member 34 is in contact with the cathode 24. The spacer member 34 is disposed adjacent to the main insulator 36. The main insulator 36 separates and insulates the high voltage connector 38 from each other. The high voltage connector 38 is engaged with the spacer member 34 to apply a high voltage to the cathode 24. The high voltage connector 38 extends through an insulating bushing 40 made of a suitable material, including ceramics, plastics, and the like.
    [27] The upper housing member 12 includes a ledge 42 extending downwards such that the main insulator 36 is spaced apart from the upper wall 18 or spaced apart by a distance. The first set of " O " rings disposed in the recesses (not shown in FIGS. 1 and 4) of the spacer member 34 communicate with the lower surface 37 of the main insulator 36. As shown in FIG. A second set of " O " rings 48 disposed in the recesses (not shown in FIGS. 1 and 4) of the ledge 42 are in communication with the top surface 35 of the main insulator 36. As shown in FIG. Thus, the central portion 39 of the main insulator 36 was pressed and held between the first set of "O" rings 46 and the second set of "O" rings 48. The main insulator 36 electrically insulates the cathode 24 from the top wall 18 so that proper discharge occurs between the cathode 24 and the anode 26.
    [28] The high energy discharge can be generated in the discharge region 28 by applying a high voltage of 20 kilovolts to the cathode 24, for example. More specifically, the application of high voltage to the cathode 24 through the high voltage connector 38 and the spacer member 34 can cause high energy discharge in the discharge region 28. The high energy discharge ionizes the gas, represented by the shaded area 29 in the vicinity of the discharge area 28 and causes the gas to react chemically. For example, the laser gas contains krypton (Kr) and fluorine (F 2 ), which chemically react to produce KrF. The formation of KrF causes energy radiation in a very narrow wavelength band as in the excimer wavelength band. This energy radiation is directed at one end to the optical element 50A (eg a window) and at the opposite end to the corresponding optical element 50B (see FIGS. 3 and 5). The energy radiation is reflected between opposing optical elements 50A, 50B and is enhanced at each reflection. Some of the energy radiation that travels in each cycle between opposing optical elements 50A, 50B passes through one of the optical elements, such as optical element 50A. The energy radiation passing through the optical element 50A has a high intensity and narrow width as well as a narrow band frequency. Optical elements 50A, 50B are made of any suitable material, such as magnesium fluoride through which deep ultraviolet light passes. Optical elements 50A, 50B are engaged with window structures or window caps 52A, 52B, respectively.
    [29] The high energy discharge in the discharge region 28 causes the temperature of the gas to increase. Heat dissipation produces sound waves and / or shock waves that propagate outwardly from the discharge region 28 and reflect off the walls 18. Back reflection of the waveform into the discharge region 28 interferes with the energy efficiency and stability of the laser system. Thus, each reflector (not shown in the drawings) and / or adjusted inner wall (not shown in the drawings) was assigned to Juhasz et al., 1998, entitled "Laser Chamber with Minimized Acoustic and Shock Wave Disturbances," assigned to the assignee of the present invention. It was incorporated into the laser chamber according to application 09 / 036,158, filed March 6, and is incorporated herein by reference in its entirety, as it is repeated below.
    [30] The pre-ionizer, usually described at 23 in FIG. 1, is placed in the laser cavity 20 to facilitate ionization of the gas, the details of which are included in US Pat. No. 5,337,330 to Larson, assigned to the assignee of the present invention. It is hereby fully condensed by mentioning it in its entirety as if immediately repeated in its entirety. The pre-ionizer 23 introduces the ultraviolet light generated by the corona discharge into the gas just before applying the respective voltage pulses between the cathode 24 and the anode 26. As a result, the gas in the discharge region 28 is filled with free electrons (eg, 10 6 to 10 8 per cm 3) prior to the generation of the high energy discharge by the electrode structure 22.
    [31] In addition to the main insulator 36, the ceramic plate 41 is engaged with the upper wall 18. The ceramic plate 41 ensures that current flowing along the main insulator 36 does not transfer to the upper wall 18. The main insulator 36 and ceramic plate 41 are coated with an insulator (not shown in the figure), and the description of the main insulator 36 and the ceramic plate 41 is assigned to the "Laser Chamber Incorporating Ceramic Insulators" handed over to the assignee of the present invention. Co. No. 09 / 089,330 to Ishihara et al. Entitled Coated with Dielectric Material, and is hereby fully incorporated by reference in its entirety as if repeated immediately below.
    [32] Moreover, the laser chamber 10 may be provided with a gas scoop (in the drawing) to allow some gas circulating around the laser cavity 20 to be sucked into the siphon for filtering by the filter 56, as shown in FIG. 2. Omitted). Filter 56 is an electrostatic precipitator, the description of which is described in U.S. Pat. It became. If the gas is usually a mixture of Ne, Kr and F, the gas is contaminated with metal fluoride particles that are formed each time the laser is discharged. That is, each time the laser is discharged, a small amount of metal corrodes from the electrode structure 22 and reacts with the gas to produce metal fluoride particles. Filter 56 removes these particles and provides particle-free gas to selected portions of the selected laser chamber 10 as described in the above-mentioned 5,048,041 patent.
    [33] As mentioned above, high energy discharges produce a large amount of local heating in the gas. Thus, a heat exchanger 60 is placed in the laser cavity 20 to reduce the temperature of the gas. The heat exchanger 60 is supported on the wall 18 of the laser chamber 10 by an end cap, one of which is shown as 62 in FIG. Flow coolant flows through the conduit 61 of the heat exchanger 60 to cool the circulating gas.
    [34] The blower assembly, usually denoted by 70, provides an efficient circulation and efficient flow of gas during operation of the laser chamber 10. As illustrated in FIGS. 5-8, the blower assembly 70 includes an inner disk portion 74A, an outer disk portion 76A extending concentrically from the inner disk portion 74A, and an outer disk portion 76A. A drive side shaft 72 which is usually formed by an integral structure having a rod section 78A extending concentrically from. The diameter of the inner disk portion 74A is larger than the diameter of the outer disk portion 76A, and the diameter of the outer disk portion 76A is in turn larger than the diameter of the rod section 78A. Therefore, the outer disk portion 76A terminates at the shoulder 80A before extending to the rod section 78A. The drive side shaft 72 is made of an essentially corrosion resistant material when exposed to gas (eg, a compound of inert gas and fluorine) to protect the mechanical and integral structure of the drive side shaft 72. . In addition, the materials used should be able to prevent corrosion, thus preventing the contamination of the gas. For example, the drive side shaft 72 is made of nickel plated aluminum, monel, or the like. The drive side shaft 72 enclosed by the bearing assembly 90A protrudes through the slot 15A of the wall 18. Bearing assembly 90A was supported in slot 15A by " O " ring 82A. Alternatively, the bearing assembly 90A may be firmly installed in the slot 15A without the support of the "O" ring 82A.
    [35] The blower assembly 70 further includes an idle side shaft 73 facing the drive side shaft 72, respectively, for supporting the fan assembly 102. In FIG. 8, the idle side shaft 73 also extends concentrically from the inner disk portion 74B, the outer disk portion 76B extending concentrically from the inner disk portion 74B, and the outer disk portion 76B. It is similar in structure to the drive side shaft 72 because it is usually formed by an integral structure with a rod section 78B. The diameter of the inner disk portion 74B is larger than the diameter of the outer disk portion 76B, and the diameter of the outer disk portion 76B is alternately larger than the diameter of the rod section 78B. Therefore, the outer disk portion 76B ends in the shoulder 80B before extending to the rod section 78B. The idle shaft 73 is made from a material that prevents corrosion to protect the mechanical and integral structure of the idle shaft 73. The materials used must also be able to prevent erosion to prevent gas contamination. For example, the idle shaft 73 is made of nickel plated aluminum, monel or the like. The idle side shafts 73 surrounded by the bearing assembly 90B each protrude through the slot 15B facing the slot 15A. Bearing assembly 90B is supported in slot 15B by " O " ring 82B. Alternatively, the bearing assembly 90B may be firmly installed in the slot 15B without the support of the "O" ring 82B. Cover plate 88 is located on slot 15B and engages an outer surface 19 of wall 18. An "O" ring seal 89B is disposed in the groove 91B on the outer surface 19 of the wall 18. Therefore, the cover plate 88 prevents gas from leaking out of the slot 15B.
    [36] The bearing assemblies 90A, 90B are usually formed by an outer race 92 which is rotatably engaged with the inner race 94 by a plurality of balls 96 (see FIGS. 9 and 10). The bearing assemblies 90A, 90B include an inner annular recess 98 that surrounds and supports the rod sections 78A, 78B of the drive side shaft 72 and the idle side shaft 73. The bearing assemblies 90A, 90B are of a suitable size to match the thickness of the drive side shaft 72 or the idle side shaft 73. Bearing assemblies 90A and 90B are lubricated to minimize wear during operation of bearing assembly 90A and 90B. Lubricants include synthetic oils such as perfluoropolyalkylether (PFPE) fluids available from several suppliers. Preferred PFPE lubricant is krytox 143AB, which is manufactured by EI Du Pont Company, Willington, Delaware. Bearing assemblies 90A and 90B are made of any suitable material that prevents significant corrosion to protect the mechanical structure and integrity of bearing assembly 90A and 90B. In addition, the materials used should be able to prevent significant corrosion to prevent contamination of the gas. Moreover, materials acting independently or as a result of chemical reactions with the gas should not degrade the function of the lubricant used in the bearing assemblies 90A, 90B. The material preferably comprises a ceramic composite, such as silicon nitride (Si 3 N 4 ).
    [37] The collar 84 is slidably engaged with the rod portion 78A of the drive side shaft 72 and supported by the key 86 (see FIG. 7). The key 86 fits into and engages with the engagement slot 83 of the drive side shaft 72. Engagement of the rotor 120 into the drive side shaft 72 causes an inner race 94 of the bearing assembly 90A to cause the inner race 94 to be compressed sandwiched between the shoulder 80A and the collar 84. Compress the collar 84. As a result, the drive side shaft 72 is engaged to rotate to the bearing assembly 90a. Insertion of the idle side shaft 73 through the inner annular recess 98 of the bearing assembly 90B causes the shoulder 80B to press the inner race 94 (see FIG. 8). As a result, the outer race 92 of the bearing assembly 90B is in communication with the stop member 99 and pressed against the stop member.
    [38] Ceramic bearings of the type described herein include Cerobear GmbH with offices in Herzagemrath, Germany; Available from several suppliers, such as Miniature Precision Bearings with offices in Keene, NH and Kayo, Japan. Si 3 N 4 is Applicant's preferred bearing material, but zirconium oxide can also be used to manufacture the bearings.
    [39] The fan assembly, shown generally at 102, is used to circulate the gas in the laser cavity 20. The fan assembly 102 includes a pair of hubs 104A, 104B concentrically attached to the inner disk portions 74A, 74B, respectively, by bolts 108. The fan assembly 102 is also provided between opposing pairs of hubs 104A, 104B such that the end 112 of the blade 110 is engaged by the rivet 116 with the outer peripheral lips 114 of the hubs 104A, 104B. It includes a plurality of blades 110 disposed. The fan assembly 102 is made of any suitable material that prevents significant corrosion and erosion when exposed to gases (eg, fluorine mixtures and inert gases) used in the laser chamber 10. For example, fan assembler 102 is made of nickel plated aluminum, monel, or the like.
    [40] The drive assembly, usually designated 132, comprises a rotor 120, for example a magnetic rotor, which engages the rod portion 78A of the drive side shaft 72. The drive pressure cup 122 is disposed on the rotor 120 and is installed on the outer surface 19 of the wall 18. "O" ring seal 89A is disposed within the groove 91A of the outer surface 19 of the wall 18. It can be seen that the rotor 120 is fully enclosed by the engagement of the drive pressure cup 122 with the outer side 19 of the wall 18. Therefore, gas that passes through and circulates through the drive side shaft 72 and the rotor 120 is enclosed so as not to be infiltrated by the drive pressure cup 122. The rotor is formed by a magnet covered by any suitable material, such as 304 CRES IAW ASTM A167 / ASTM A240, which is not affected by the corrosive effects of the gas. A small gap 124 is provided between the outer surface 121 of the rotor 120 and the drive pressure cup 122. The drive assembly 132 further includes a motor (eg, a stator) outlined at 130. Motor 130 is disposed on drive pressure cup 122 to operably rotate rotor 120 and drive side shaft 72. Motor 130 and rotor 120 form a brushless DC motor that operates in a manner well understood in the art.
    [41] As illustrated by the arrow 11 in FIG. 1, the vanes 13 are optionally disposed in the laser cavity 20 to assist in the directional flow of gas. The directional flow 11 of gas circulates counterclockwise around the heat exchanger 60 and flows between the blades 110 through the electrical discharge region 28.
    [42] To operate the blower 70 of the laser chamber 10, the motor 130 operably rotates the fan assembly 102. The gas circulates through the laser cavity 20 as indicated by the directional flow arrow 11. Normally, the gas circulates through the discharge region 28 at a flow rate of 22-30 meters per second, but this amount is defined by the frequency of the pulsed laser system. The gas also flows bypass the drive side shaft 72 and the idle side shaft 73 and circulates about the bearing assemblies 90A, 90B. Contact of the gas to the bearing assemblies 90A, 90B prevents any substantial corrosion of the outer race 92, the inner race 94, or the ball 96. In addition, the ceramic properties (eg, Si 3 N 4 ) of the bearing assemblies 90A, 90B prevent any substantial erosion to prevent contamination of the gas. Moreover, ceramic compounds (eg Si 3 N 4 ) do not react chemically with the gas. Thus, the bearing assemblies 90A and 90B and the lubricating oil (for example, PFPE) used do not deteriorate in function.
    [43] As such, while the invention has been described herein with reference to specific embodiments of the invention, modifications, various modifications, and alternatives are intended in the above disclosure, and in certain instances certain features of the invention are as described. It will be understood that they may be used without departing from the scope of the corresponding other features.
    权利要求:
    Claims (26)
    [1" claim-type="Currently amended] a) the laser chamber having an interconnected wall forming a laser cavity containing gas in the laser chamber;
    b) a drive side shaft supported by the laser chamber;
    c) a first bearing assembly surrounding the drive side shaft in the laser cavity and exposed to the gas, the first bearing assembly comprising a ceramic composite such that the gas does not substantially react with the ceramic composite;
    d) a drive assembly operatively engaged with the drive side shaft to rotate the drive side shaft; And
    e) a fan assembly disposed within the laser cavity for circulating the gas and engaged with the drive side shaft.
    [2" claim-type="Currently amended] The method of claim 1, wherein the laser chamber,
    An electrode structure comprising an anode and a cathode separated by a distance forming a discharge region and disposed within said laser cavity; A pre-ionizer disposed in the laser cavity and positioned adjacent the electrode structure; A heat exchanger disposed within the laser cavity; The insulating member disposed in the laser cavity such that an insulating member is positioned in between the cathode and one of the walls closest to the cathode; And at least one vane selectively positioned within the laser cavity for directing a directional flow of gas.
    [3" claim-type="Currently amended] The laser apparatus according to claim 1, wherein the ceramic composite contains silicon nitride (Si 3 N 4 ).
    [4" claim-type="Currently amended] 2. The drive shaft according to claim 1, wherein the drive side shaft includes an inner disk portion, an outer disk portion extending from the inner disk portion, and a rod extending from the outer disk portion so that the first bearing assembly supports the rod and is in communication with a shoulder. And an integral structure having the shoulder formed on the outer disk portion.
    [5" claim-type="Currently amended] The laser apparatus of claim 1, further comprising a collar that slidably engages the rod to squeeze the first bearing assembly against the shoulder.
    [6" claim-type="Currently amended] The laser apparatus of claim 1, further comprising a key that engages the rod to support the collar.
    [7" claim-type="Currently amended] 2. The ceramic of claim 1, comprising an ceramic composite surrounding the idle shaft and the idle shaft that engages the fan assembly and being exposed to the gas in the laser cavity, wherein the gas does not substantially react with the ceramic composite. And a second bearing assembly.
    [8" claim-type="Currently amended] 8. A laser device according to claim 7, wherein said ceramic compound comprises silicon nitride (Si 3 N 4 ).
    [9" claim-type="Currently amended] 8. The idler shaft of claim 7, wherein the idle side shaft extends from the inner disk portion, the outer disk portion extending from the inner disk portion, and the outer disk portion so that the second bearing assembly supports the rod and communicates with the shoulder. And the rod and the integral structure having the shoulder formed on the outer disk portion.
    [10" claim-type="Currently amended] 2. The drive assembly of claim 1, wherein the drive assembly includes a rotor for engaging the drive side shaft, a motor disposed on the rotor for operably driving the rotor, and a drive disposed between the rotor and the motor. Laser device comprising a pressure cup.
    [11" claim-type="Currently amended] The fan assembly of claim 1, wherein the fan assembly includes a first hub connected to the drive side shaft, a second hub connected to the idle side shaft, and a plurality of blades disposed between the first hub and the second hub. Characterized in that the laser device.
    [12" claim-type="Currently amended] The laser apparatus of claim 1, wherein the ceramic composite includes zirconium oxide (ZrO 2 ).
    [13" claim-type="Currently amended] a) fan assembly for circulating gas;
    b) a drive side shaft coupled to the fan assembly to operably drive the fan assembly;
    c) a first bearing assembly surrounding the drive side shaft to support the drive side shaft, the first bearing assembly comprising a ceramic composite; And
    d) a drive assembly operatively engaged with the drive side shaft for rotating the drive side shaft.
    [14" claim-type="Currently amended] 14. The blower of claim 13 wherein the ceramic composite comprises silicon nitride (Si 3 N 4 ).
    [15" claim-type="Currently amended] 14. The blower of claim 13, further comprising the second bearing assembly surrounding the idle side shaft and the idle side shaft engaged with the fan assembly and comprising a ceramic composite.
    [16" claim-type="Currently amended] 16. The blower of claim 15, wherein the ceramic composite comprises silicon nitride (Si 3 N 4 ).
    [17" claim-type="Currently amended] 16. The blower of claim 15, wherein the ceramic composite comprises zirconium oxide (ZrO 2 ).
    [18" claim-type="Currently amended] The fan assembly of claim 13, wherein the fan assembly comprises a first hub connected to the drive side shaft, a second hub connected to the idle side shaft, and a plurality of blades disposed between the first hub and the second hub. A blower characterized by.
    [19" claim-type="Currently amended] 14. The blower of claim 13 comprising a rotor engaging the drive side shaft and a motor disposed on the rotor for operably driving the rotor.
    [20" claim-type="Currently amended] a) placing a blower assembly in the laser chamber including a drive side shaft, a fan assembly engaged with the drive side shaft to circulate gas, and a bearing assembly surrounding the drive side shaft and comprising a ceramic composite; And
    b) rotating the drive side shaft to operably drive the fan assembly and to circulate gas between the fan assembly and the laser chamber. Way.
    [21" claim-type="Currently amended] 21. The method of claim 20, wherein the ceramic composite comprises silicon nitride (Si 3 N 4 ).
    [22" claim-type="Currently amended] 21. The method of claim 20, wherein the ceramic composite comprises zirconium oxide (ZrO 2 ).
    [23" claim-type="Currently amended] 21. The method of claim 20, further comprising providing lubricant to the bearing assembly prior to the rotating (b).
    [24" claim-type="Currently amended] 21. The method of claim 20, further comprising circulating the gas against the bearing assembly without substantially causing any corrosion of the bearing assembly.
    [25" claim-type="Currently amended] 21. The method of claim 20, further comprising circulating the gas against the bearing assembly without substantially contaminating the gas.
    [26" claim-type="Currently amended] 21. The method of claim 20, further comprising circulating the gas against the bearing assembly without substantially degrading the lubricating oil.
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    同族专利:
    公开号 | 公开日
    JP2000077747A|2000-03-14|
    TW419875B|2001-01-21|
    KR100421276B1|2004-03-09|
    WO2000013268A1|2000-03-09|
    US6208675B1|2001-03-27|
    AU5332199A|2000-03-21|
    EP1108274A4|2005-11-02|
    EP1108274A1|2001-06-20|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    1998-08-27|Priority to US09/141,068
    1998-08-27|Priority to US09/141,068
    1999-08-02|Application filed by 아킨스 로버트 피., 사이머 인코포레이티드
    2001-07-31|Publication of KR20010073014A
    2004-03-09|Application granted
    2004-03-09|Publication of KR100421276B1
    优先权:
    申请号 | 申请日 | 专利标题
    US09/141,068|1998-08-27|
    US09/141,068|US6208675B1|1998-08-27|1998-08-27|Blower assembly for a pulsed laser system incorporating ceramic bearings|
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